Description
Brooks Instrument 5853i Thermal Mass Flow Controller
- Long-term zero stability of <0.2% full scale per year
- Excellent accuracy
- Wide range of flow ratings – from 0.003 up to 2500 lpm
- Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar)
- Programmable multi-gas/multi-range capabilities
- Independent & easily accessible diagnostic/service port
- Broad array of communication options including DeviceNet, EtherCAT, Profibus and RS-485 plus analog interfaces
- Modular design is easy-to-service at the factory or in the field
- Weight: 14.6 lbs.
- Dimensions: 11 x 3.5 x 7 in
JB – R1 F1 P50
