The attached photos represent a Brooks 5850TR Mass Flow Controller being sold as is with the understanding that we sell quality products and equipment that operate as intended unless otherwise stated. Please review my feedback to see that I have a solid record.
3 sccm to 30 slpm* (Nitrogen equivalent)
Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and
and 101.3 kPa (760 Torr).
±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
0.25% of rate
Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements (NC Valve):
+15 Vdc ±5%, 35 mA
-15 Vdc ±5%, 180 mA
3.5 watts power consumption
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Code: R1 B3 P86