Brooks 5850TR Mass Flow Controller
- Standard Ranges: 3 sccm to 30 slpm* (Nitrogen equivalent)
- Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International)
- Standard: 0°C and 101.3 kPa (760 Torr).
- Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm.
- Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full-scale final value with a 0 to 100% command step.
- Power Requirements (NC Valve): +15 Vdc ±5%, 35 mA -15 Vdc ±5%, 180 mA 3.5 watts power consumption
jb – R1 B3 P86