Brooks 5850TR Mass Flow Controller


1 in stock



The attached photos represent a Brooks 5850TR Mass Flow Controller being sold as is with the understanding that we sell quality products and equipment that operate as intended unless otherwise stated. Please review my feedback to see that I have a solid record.


  • Standard Ranges:
    3 sccm to 30 slpm* (Nitrogen equivalent)


  • Standard temperature and pressure in accordance with SEMI
    (Semiconductor Equipment and


  • Materials International)


  • Standard: 0°C
    and 101.3 kPa (760 Torr).


  • Accuracy:
    ±1% full scale including linearity at calibration conditions.
    ±1.5% full scale including linearity for flow ranges greater than 20 slpm.


  • Repeatability:
    0.25% of rate
    Response Time:
    Less than 3 seconds response to within 2% of full scale final value with a 0
    to 100% command step.


  • Power Requirements (NC Valve):
    +15 Vdc ±5%, 35 mA
    -15 Vdc ±5%, 180 mA
    3.5 watts power consumption


Our business hours are Monday through Friday from 8:00 AM to 4:00 PM Eastern Time.  If you have questions, offers, or any other concerns regarding a listing outside our normal business hours, please allow for us to respond on the following business day. In the event you have any issues with your purchase, please contact us first. Customer satisfaction is our highest priority.

Code: R1 B3 P86

Additional information

Weight 0.91 lbs
Dimensions 5 × 5 × 5 in
Flow Meter Type



260 Interstate Circle
Suite 2A
Frederick , MD 21704

Call us

301 803 9722
240 375 6333