Brooks 5850TR Mass Flow Controller

$280.00

1 in stock



SKU: 0516 Category:

Description

Brooks 5850TR Mass Flow Controller

  • Standard Ranges: 3 sccm to 30 slpm* (Nitrogen equivalent) 
  • Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) 
  • Standard: 0°C and 101.3 kPa (760 Torr). 
  • Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. 
  • Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full-scale final value with a 0 to 100% command step. 
  • Power Requirements (NC Valve): +15 Vdc ±5%, 35 mA -15 Vdc ±5%, 180 mA 3.5 watts power consumption 

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Additional information

Weight 7 lbs
Dimensions 7 × 7 × 5 in
Flow Meter Type

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