Description
Brooks Instrument 5853i Mass Flow Controller
Features:
- Long-term zero stability of <0.2% full scale per year
- Excellent accuracy
- Wide range of flow ratings – from 0.003 up to 2500 lpm
- Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar)
- Programmable multi-gas/multi-range capabilities
- Independent & easily accessible diagnostic/service port
- Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and
- RS-485 plus analog interfaces
- Modular design is easy-to-service at the factory or in the field
- MPN: 5853IAAA2D1E330A
Benefits:
- Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership
- Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points
- Choose one device platform for different gases and flow ranges
- Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory
- User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation
- Durable, robust metal top lid prevents damage during installation
- Multi-protocol communication interface simplifies integration into existing systems
ssg – R1 F1 P50
