Brooks Instrument – 5853i Mass Flow Controller (5853IAAA2D1E330A)


1 in stock



The attached photos represent a Brooks Instrument 5853i Mass Flow Controller being sold as is with the understanding that we sell quality products and equipment that have been tested and operate as intended unless otherwise stated.


  • Long-term zero stability of <0.2% full scale per year


  • Excellent accuracy


  • Wide range of flow ratings – from 0.003 up to 2500 lpm


  • Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar)


  • Programmable multi-gas/multi-range capabilities


  • Independent & easily accessible diagnostic/service port


  • Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and


  • RS-485 plus analog interfaces


  • Modular design is easy-to-service at the factory or in the field





  • Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership


  • Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points


  • Choose one device platform for different gases and flow ranges


  • Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory


  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation


  • Durable, robust metal top lid prevents damage during installation


  • Multi-protocol communication interface simplifies integration into existing systems


  • Superior metrology and primary calibration systems based on global standards ensure accuracy



Our business hours are from 8:00 AM to 4:00 PM Monday through Friday Eastern Time.  If you have questions, offers, or any other concerns regarding a listing outside our normal business hours, please allow for us to respond on the following business day.

Although we do not offer a warranty, we highly encourage you to contact us directly if this unit does not perform as advertised. Should you wish to return your purchase, please pay return shipping and have your purchase shipped directly to our warehouse. As soon as the item is back in our possession, we will refund your money within 24 hours.

Code: R1 F1 P50



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Additional information

Weight 8.16 lbs
Dimensions 12 × 7 × 4 in

Modified Item

Custom Bundle




Intended Use/Discipline

260 Interstate Circle
Suite 2A
Frederick , MD 21704

Call us

301 803 9722
240 375 6333