Brooks Instrument 5853i Mass Flow Controller

Description

Brooks Instrument 5853i Mass Flow Controller

Features: 

• Long-term zero stability of <0.2% full scale per year 
• Excellent accuracy 
• Wide range of flow ratings – from 0.003 up to 2500 lpm 
• Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar) 
• Programmable multi-gas/multi-range capabilities 
• Independent & easily accessible diagnostic/service port 
• Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and 
• RS-485 plus analog interfaces 
• Modular design is easy-to-service at the factory or in the field 
• MPN: 5853IAAA2D1E330A

Benefits: 

• Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership 
• Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points 
• Choose one device platform for different gases and flow ranges 
• Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory 
• User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation 
• Durable, robust metal top lid prevents damage during installation 
• Multi-protocol communication interface simplifies integration into existing systems

ssg – R1 F1 P50

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