Brooks Instrument 5853i Mass Flow Controller

Original price was: $830.00.Current price is: $705.50.

1 in stock

SKU: 000512 Category:


Brooks Instrument 5853i Mass Flow Controller


  • Long-term zero stability of <0.2% full scale per year 
  • Excellent accuracy 
  • Wide range of flow ratings – from 0.003 up to 2500 lpm 
  • Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar) 
  • Programmable multi-gas/multi-range capabilities 
  • Independent & easily accessible diagnostic/service port 
  • Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and 
  • RS-485 plus analog interfaces 
  • Modular design is easy-to-service at the factory or in the field 
  • MPN: 5853IAAA2D1E330A


  • Long-term sensor stability reduces maintenance and periodic recalibration requirements, reducing total cost of ownership 
  • Proprietary Brooks Instrument thermal sensing technology delivers superior signal to noise performance for improved accuracy at low set points 
  • Choose one device platform for different gases and flow ranges 
  • Storage and pre-programming of up to six gas calibrations lets users easily switch between different gases and ranges on a single device, and reduces inventory 
  • User-accessible service port simplifies installation, troubleshooting and diagnostic tasks without disturbing flow controller operation 
  • Durable, robust metal top lid prevents damage during installation 
  • Multi-protocol communication interface simplifies integration into existing systems

ssg – R1 F1 P50


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Additional information

Weight 30 lbs
Dimensions 12 × 9 × 9 in

Modified Item

Custom Bundle




Intended Use/Discipline

260 Interstate Circle
Suite 2A
Frederick , MD 21704

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301 803 9722
240 375 6333