Description
Brooks Instrument 5853i Mass Flow Controller (NO Flow Meter)
- Long-term zero stability of <0.2% full scale per year
- Excellent accuracy
- Wide range of flow ratings – from 0.003 up to 2500 lpm
- Highest pressure ratings – up to 1500 psi/100 bar (optional: 4500 psi/310 bar)
- Programmable multi-gas/multi-range capabilities
- Independent & easily accessible diagnostic/service port
- Broad array of communication options including DeviceNet®, EtherCAT®, Profibus® and RS-485 plus analog interfaces
- MPN: 5853IAAA2D1D30A
ssg – R1 F1 P50
